Porous Ceramic Vacuum Chuck

Porous ceramic chuck is used to support and chuck semiconductor wafer during grinding and dicing process, it has very strict requirement in flatness and parallism. Based on LSTD’s strong R&D and production ability, we are able to make almost all kinds of porous ceramic chucks used on the machine of Disco, G&N, Okamoto etc.

Advantages:

● High precision: flatness less than 2um,parallism less than 5um

● Long lifetime

● Easy dressing

● Tailor made

Besides of porous ceramic chucks which are mostly used for wafer back grinding, LSTD also designs and manufactures chucks of some other material for special purpose like wafer edge grinding, cleaning , coating etc.

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