The CMP series equipment independently developed by LSTD supplies semiconductor material manufacturers such as SI, SIC,GaAs,lnP,GaN,CdTe,diamond, etc. The wafer recycling equipment has entered multiple semiconductor manufacturing companies such as SMIC; The automated production line for silicon carbide polishing will be delivered to the customer's factory for trial production in Q1 2024;
On the basis of the original laboratory, millions of yuan will be invested to build 100000 level, 10000 level, and 100 level clean rooms and precision testing equipment, which will be inspected and put into use in the second half of 2024.
6"/8" SiC wafer polishing line
6"/8" SiC wafer
Cleaning room 100 class
Multi-slot cleaning machine
Inspection capacity
