CMP Pad Conditioner

Pad conditioners are used for the conditioning of both stock polishing pads and fine polishing pads, by doing conditioning on these pads, pad flatness can be well controlled, and roughness of pad surface can be optimized, thus the geometry precision of polished wafers can be guaranteed, and polishing efficiency will be more stable than non-conditioned pads, often, by proper dressing with pad conditioners, the lifetime of polishing pad can be prolonged to up to 30%~50%.

Pad conditioners are useful in both single side polishing process and double side polishing process. For each purpose, it has many possible designs which may come out different results, whatever designs we use, flatness control, parallism control and diamond bonding strength control are always strictly executed without compromise. 

Single side pad conditioner

Double side pad conditioner assembly

Ceramic polishing cloth dressing plate is also used for dressing of polishing pad. At the initial stage of the use of the polishing pad, this pad dresser can be used to dress polishing pad to achieve a good adhesive backing and control the flatness of the polishing pad.

Single side pad conditioner assembly

Double side pad conditioning carrier

Ceramic plate pad dresser

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