Ceramic Plate Flatness Gauge

RF series ceramic plate flatness measuring instrument is specially developed for the measurement of ceramic plate flatness in semiconductor industry; The measuring instrument can measure the ceramic flatness in different directions, simulate the surface shape of the ceramic plate through its own data analysis software, and can be used as an effective tool for the quality control of ceramic plate in semiconductor manufacturers.

RF series ceramic plate flatness measuring instrument has a measurement resolution of 0.1um and a measurement accuracy of < 0.5um/1000mm;During the measurement process, the data are transmitted in real time and stored in the computer.

After the data collected from the measuring instrument is processed by a special program, the flatness value in a specific direction of the ceramic plate can be generated. At the same time, the morphology in this direction can also be reflected by a curve

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