Double Side Polishing Machine
LDS series double-sided lapping/polishing machine is designed and manufactured for double side lapping or polishing of workpieces. Through double-sided processing, the flatness, parallelism and roughness of workpieces can be controlled at the same time. LDS double-sided lapping/polishing machines adopts circular casting body, which has good rigidity and stability; The equipment adopts closed-loop pressure control system, which can accurately control the processing pressure. The whole series of LDS equipment adopts circular body design, which occupies a small area and makes the maintenance and operation of the equipment more convenient.
LDS series double-sided lapping machine can be equipped with a workpiece thickness control system according to the needs of customers. It can set the target thickness of the workpiece and detect it in real time. When the workpiece reaches the set lapping thickness, machine will stop automatically, and the lapping process is completed.
LDS series double-sided polishing machine uses stainless steel polishing plate. In some special occasions, such as polishing compound semiconductors like GaAs, InP and other materials, due to the strong corrosivity of the polishing slurry, all parts of the equipment in contact with the polishing slurry are made of corrosion-resistant materials or anti-corrosion treatment.
LDS Double side lapping / polishing machine
Type and spec | LDS 5B-8L | LDS 5B-8L | LDS 9B-5L | LDS 9B-5L | LDS 13B-6L | LDS 13B-6P |
Carrier diameter | 108mm | 108mm | 230mm | 230mm | 321mm | 321mm |
No. of carriers | 8 | 8 | 5 | 5 | 6 | 6 |
Lapping plate OD | 380 | 388 | 630 | 640 | 938mm | 958mm |
Lapping plate ID | 220 | 212 | 242 | 232 | 407mm | 387mm |
Lapping plate RPM(Upper & Lower) | 10~100 | 10~100 | 5-60 | 5-60 | 5~60 | 5~60 |
Lapping plate driven motor power | 1.5KW | 1.5KW | 3.7KW | 3.7KW | 5.5KW | 7.5KW |
Outer pin gear driven motor power | 0.4KW | 0.4KW | 0.75KW | 0.75KW | 1.5KW | 1.5KW |
Ring gear driven motor power | 0.4KW | 0.4KW | 0.75KW | 0.75KW | 1.5KW | 1.5KW |
Power supply | 3PH,380V,50Hz | |||||
Type and spec | LDS 16B-5L | LDS 16B-5P | LDS 20B-5L | LDS 20B-5P | LDS 22B-5L | LDS 22B-5P |
Carrier diameter | 430mm | 430mm | 510mm | 510mm | 556mm | 556mm |
No. of carriers | 5 | 5 | 5 | 5 | 5 | 5 |
Lapping plate OD | 1114mm | 1144mm | 1355mm | 1380mm | 1456mm | 1480mm |
Lapping plate ID | 384mm | 354mm | 458mm | 432mm | 488mm | 464mm |
Lapping plate RPM(Upper & Lower) | 5~54rpm | 5~54rpm | 5~59rpm | 5~59rpm | 5~59rpm | 5~59rpm |
Lapping plate driven motor power | 11KW | 15KW | 18KW | 22KW | 18KW | 22KW |
Outer pin gear driven motor power | 2KW | 2KW | 3KW | 3KW | 3KW | 3KW |
Ring gear driven motor power | 2KW | 2KW | 5.5KW | 5.5KW | 5.5KW | 5.5KW |
Power supply | 3PH,380V,50Hz | |||||
LDS Double side polishing machine _ slurry system & parts
LDS series double-sided polishing machine can be equipped with dust cover according to the needs of customers, which is used to protect the polishing area and prevent the leakage of harmful gases that may be generated from polishing liquid.
LDS series double-sided polishing machine can be used for pure mechanical polishing and chemical mechanical polishing; According to the specific polishing application, the equipment will carry out appropriate material selection or surface treatment for some parts exposed to polishing slurry, Especially when corrosive polishing slurry is used, all parts in contact with the polishing slurry are made of corrosion-resistant non-metallic materials or metal materials with corrosion-resistant treatment on the surface.

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