Double Side Polishing Machine
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Double Side Polishing Machine

LDS series double-sided polishing machine uses stainless steel polishing plate. In some special occasions, such as polishing compound semiconductors like GaAs, InP and other materials, due to the strong corrosivity of the polishing slurry, all parts of the equipment in contact with the polishing slurry are made of corrosion-resistant materials or anti-corrosion treatment.
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Product Introduction

LDS series double-sided lapping/polishing machine is designed and manufactured for double side lapping or polishing of workpieces. Through double-sided processing, the flatness, parallelism and roughness of workpieces can be controlled at the same time. LDS double-sided lapping/polishing machines adopts circular casting body, which has good rigidity and stability; The equipment adopts closed-loop pressure control system, which can accurately control the processing pressure. The whole series of LDS equipment adopts circular body design, which occupies a small area and makes the maintenance and operation of the equipment more convenient.


LDS series double-sided lapping machine can be equipped with a workpiece thickness control system according to the needs of customers. It can set the target thickness of the workpiece and detect it in real time. When the workpiece reaches the set lapping thickness, machine will stop automatically,  and the lapping process is completed.


LDS series double-sided polishing machine uses stainless steel polishing plate. In some special occasions, such as polishing compound semiconductors like GaAs, InP and other materials, due to the strong corrosivity of the polishing slurry, all parts of the equipment in contact with the polishing slurry are made of corrosion-resistant materials or anti-corrosion treatment.


LDS Double side lapping / polishing machine

Type and spec

LDS 5B-8L

LDS 5B-8L

LDS 9B-5L

LDS 9B-5L

LDS 13B-6L

LDS 13B-6P

Carrier diameter

108mm

108mm

230mm

230mm

321mm

321mm

No. of carriers

8

8

5

5

6

6

Lapping plate OD

380

388

630

640

938mm

958mm

Lapping plate ID

220

212

242

232

407mm

387mm

Lapping plate RPM(Upper & Lower)

10~100

10~100

5-60

5-60

5~60

5~60

Lapping plate driven motor power

1.5KW

1.5KW

3.7KW

3.7KW

5.5KW

7.5KW

Outer pin gear driven motor power

0.4KW

0.4KW

0.75KW

0.75KW

1.5KW

1.5KW

Ring gear driven motor power

0.4KW

0.4KW

0.75KW

0.75KW

1.5KW

1.5KW

Power supply

3PH,380V,50Hz


Type and spec

LDS 16B-5L

LDS 16B-5P

LDS 20B-5L

LDS 20B-5P

LDS 22B-5L

LDS 22B-5P

Carrier diameter

430mm

430mm

510mm

510mm

556mm

556mm

No. of carriers

5

5

5

5

5

5

Lapping plate OD

1114mm

1144mm

1355mm

1380mm

1456mm

1480mm

Lapping plate ID

384mm

354mm

458mm

432mm

488mm

464mm

Lapping plate RPM(Upper & Lower)

5~54rpm

5~54rpm

5~59rpm

5~59rpm

5~59rpm

5~59rpm

Lapping plate driven motor power

11KW

15KW

18KW

22KW

18KW

22KW

Outer pin gear driven motor power

2KW

2KW

3KW

3KW

3KW

3KW

Ring gear driven motor power

2KW

2KW

5.5KW

5.5KW

5.5KW

5.5KW

Power supply

3PH,380V,50Hz


LDS Double side polishing machine _ slurry system & parts

LDS series double-sided polishing machine can be equipped with dust cover according to the needs of customers, which is used to protect the polishing area and prevent the leakage of harmful gases that may be generated from polishing liquid.


LDS series double-sided polishing machine can be used for pure mechanical polishing and chemical mechanical polishing; According to the specific polishing application, the equipment will carry out appropriate material selection or surface treatment for some parts exposed to polishing slurry, Especially when corrosive polishing slurry is used, all parts in contact with the polishing slurry are made of corrosion-resistant non-metallic materials or metal materials with corrosion-resistant treatment on the surface.


LDS Double side polisher

LDS Double side polisher

 +

Polishing slurry management system 

LDS Double side polisher

LDS Double side polisher

 +

RS slurry mixing and recirculating system 

Brush dresser for DSP

Brush dresser for DSP

Pad conditioner for DSP

Pad conditioner for DSP



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