MP Series Mechanical Polishing Machine
MP Series Mechanical Polishing Machine
MP Series Mechanical Polishing Machine

MP Series Mechanical Polishing Machine

Name: MP Series Mechanical Polishing Machine
Brand: LSTD
SKU: 198735009

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Product Introduction

LSTD MP series mechanical polishing machine is developed to meet the requirements of rapid polishing of super hard materials. The equipment uses soft metal plate or composite plate and diamond slurry with specific particle size, which can make the processed workpiece reach mirror surface quickly. Another significant advantage of mechanical polishing is that under the premise of good control of plate shape, it can obtain a very flat workpiece surface with almost no edge collapse. For the workpiece (wafer) with epitaxial application, after mechanical polishing, the process time of chemical mechanical polishing can be greatly shortened, and the cost be reduced. MP series chemical mechanical polishing machine can be used for mechanical polishing of various super hard semiconductor wafers such as sapphire, silicon carbide and diamond, as well as polishing of other super hard materials such as ceramics, cemented carbide and quenched steel.

Like CP series chemical mechanical polishing machines:

MP series mechanical polishing machines are also divided into three same models: basic type , pressure disc center driven type (CD Type) and pressure plate independent driven type (IDP type) (see page4 ; MP series mechanical polishing machines have a similar structure to CP series chemical mechanical polishing machines, but in order to meet the needs of mechanical polishing, MP series mechanical polishing machines are equipped with polishing plate turning system to groove the plates.

IDP Type mechanical polishing machine:

IDP Type mechanical polishing machine can also further improve the mechanical polishing accuracy by integrate swing function of the pressure plate; In order to solve the problems of expansion deformation and hardness reduction of polishing plate caused by heating generated by mechanical polishing, LSTD has developed a new technology and applied for a patent which can effectively control the plate surface temperature, plate shape and plate hardness; For the mechanical polishing of the third generation semiconductor materials such as silicon carbide, diamond and other wafers, this technology can effectively solve the problems of mechanical polishing efficiency and accuracy.

BASIC TYPE MP series mechanical polishing machine

Type and spec	MP-380B(V*)	MP-460B(V)	MP-610B(V)	MP-810B(V)	MP-910B(V)	MP-1280B(V)	MP-1500B(V)
Polishing Plate diameter	381mm	460mm	598mm	796mm	898mm	1262mm	1480mm
Pressure plate diameter	139mm	150mm	240mm	304.8mm	360mm/355mm	485mm	576mm
No. of pressure plate	3	4	4	4	4	4	4
Polishing plate RPM	10~160rpm	10~160rpm	10~115rpm	10~87rpm	10-80rpm	10~64rpm	10-54rpm
Polishing pressure(max.)	100kg	100kg	140kg	250kg	320kg	560kg	760kg
Motor power	0.75kw	1.5kw	3kw	5.5KW	11kw	22kw	35kw
Power supply	3PH,380V,50Hz
Dimension	1250L 770W 1560H	1360L 850W 1650H	1550L 900W 1700H	1980L 920W 1900H	2100L 1262W 2120H	2550L 1670W 2200H	3500L 2020W 2500H
Weight ( Approx..)	420kg	720kg	1080kg	2200kg	2400kg	7300kg	9500kg
Wafer loading capacity	2"-4pcs/head 2"-3pcs/head(V)	2"-5pcs/head 2"-4pcs/head(V)	2"-10pcs/head 4"-3pcs/head	2"-14pcs/head 4"-5pcs/head 5"-3pcs/head	4"-7pcs/head 5"-5pcs/head 6"-3pcs/head	5"-8pcs/head 6"-6pcs/head 8"-3pcs/head	6"-8pcs/head 8"-5pcs/head

CD TYPE MP series mechanical polishing machine

Type and spec	MP-380B-CD	MP-460B-CD	MP-610B-CD	MP-810B-CD
Polishing Plate diameter	381mm	460mm	598mm	796mm
Pressure plate diameter	139mm	150mm	240mm	304.8mm
No. of pressure plate	3	4	4	4
Polishing plate RPM	10~160rpm	10~160rpm	10~115rpm	10~87rpm
Polishing pressure(max.)	100kg	100kg	140kg	250kg
Center driven Motor power	400W	750KW	1KW	1.5KW
Main Motor power	0.75kw	1.5KW	3kw	5.5KW
Power supply	3PH,380V,50Hz
Dimension	1250L 770W 1560H	1360L 850W 1650H	1550L 900W 1700H	1980L 920W 1900H
Weight ( Approx..)	420kg	720kg	1080kg	2200kg
Wafer loading capacity	2"-4pcs/head	2"-5pcs/head	2"-10pcs/head 4"-3pcs/head	2"-14pcs/head 4"-5pcs/head 5"-3pcs/head

Type and spec	MP-910B-CD	MP-1280B-CD	MP-1500B-CD
Polishing Plate diameter	898mm	1262mm	1480mm
Pressure plate diameter	360mm / 355mm	485mm	576mm
No. of pressure plate	4	4	4
Polishing plate RPM	10-80rpm	10~64rpm	10-54rpm
Polishing pressure(max.)	320kg	560kg	760kg
Center driven Motor power	2KW	3.5KW	5.5KW
Main Motor power	11kw	22kw	35kw
Power supply	3PH,380V,50Hz
Dimension	2100L 1262W 2120H	2550L 1670W 2200H	3500L 2020W 2500H
Weight ( Approx..)	2400kg	7300kg	9500kg
Wafer loading capacity	4"-7pcs/head 5"-5pcs/head 6"-3pcs/head	5"-8pcs/head 6"-6pcs/head 8"-3pcs/head	6"-8pcs/head 8"5pcs/head

IDP TYPE MP series mechanical polishing machine

Type and spec	MP-380B-IDP	MP-460B-IDP	MP-610B-IDP	MP-810B-IDP
Polishing Plate diameter	381mm	460mm	598mm	796mm
Pressure plate diameter	139mm	150mm	240mm	304.8mm
No. of pressure plate	3	3	4	4
Polishing plate RPM	10~160rpm	10~160rpm	10~115rpm	10~87rpm
Polishing pressure(max.)	100kg	100kg	140kg	250kg
Pressure plate driven Motor power	200W	200W	400KW	400KW
Pressure plate rotation speed	0~200rpm	0~200rpm	0~100rpm	0~100rpm
Main Motor power	0.75kw	1.5kw	3kw	5.5KW
Power supply	3PH,380V,50Hz
Dimension	950L 770W 1560H	1100L 850W 1650H	1350L 900W 1700H	1600L 920W 1900H
Weight ( Approx..)	350kg	350kg	980kg	1800kg
Wafer loading capacity	2"-4pcs/head	2"-4pcs/head	2"-10pcs/head 4"-3pcs/head	2"-14pcs/head 4"-5pcs/head 5"-3pcs/head

Type and spec	MP-910B-IDP	MP-1280B-IDP	MP-1500B-IDP
Polishing Plate diameter	898mm	1262mm	1480mm
Pressure plate diameter	360mm / 355mm	485mm	576mm
No. of pressure plate	4	4	4
Polishing plate RPM	10-80rpm	10~64rpm	10-54rpm
Polishing pressure(max.)	320kg	560kg	760kg
Pressure plate driven Motor power	2KW	1KW	1.3KW
Pressure plate rotation speed	2KW	0~100rpm	0~100rpm
Main Motor power	11kw	22kw	35kw
Power supply	3PH,380V,50Hz
Dimension	1800L 1262W 2120H	2180L 1670W 2200H	2800L 2020W 2500H
Weight ( Approx..)	2200kg	7000kg	8600kg
Wafer loading capacity	4"-7pcs/head 5"-5pcs/head 6"-3pcs/head	5"-8pcs/head 6"-6pcs/head 8"-3pcs/head	6"-8pcs/head 8"5pcs/head

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