Polishing Templates

Template is for the holding of wafers by  water film tension instead of by wax, compared with way of holding wafers by wax, using templates to hold wafer is of higher efficiency and lower production cost. The pocket of templates can be made into various of shapes and depth for the holding of specific parts. 

To control the geometry precision of polished wafers, templates are often adhered onto  a ceramic plate with its PSA back tape.  Corresponding to materials of wafers and characteristics of slurries, different types of backing films can be choose. For the polishing of Si wafer , sapphire wafers, it is recommended to use open cell backing film, while for the polishing of GaAs, InP, CZT  etc. where  the polishing slurry is more corrosive, close cell backing film is recommended.

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